Shibuya Optical Co., Ltd.Shibuya Optical Co., Ltd.

Ultra-short Pulse YAG & Yb Lasers

A New Solution for High-Throughput Laser Micromachining

If you have any questions about laser processing, such as "I want to process this material," "Can you customize it?" or
"Which laser should I choose?" Please consult with Shibuya Optical.

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About SUPER WAVE Corporation

SUPER WAVE Co., Ltd. was founded in 2018 and is located in the Beijing Economic-Technological Development Area. We are a specialized manufacturer of ultra-short pulse lasers and related products. In 2020, we were certified as a National High-Tech Enterprise, and in 2021, we were selected as a "Specialized and New" SME in Beijing.

Since our establishment, we have been dedicated to providing top-quality ultra-short pulse lasers for the global micro and nano processing industries, striving to become a world-leading company in the laser sector. Our ultra-short pulse lasers are primarily used for industrial ultra-precision processing, offering over a dozen product Model Numbers in the picosecond and femtosecond series. We also support customized solutions to meet user requirements.

Our R&D team has over 10 years of experience in optics, mechanics, electronics, and control, ensuring a solid background to deliver value to our customers. We operate a 2000-square-meter Class 1000 cleanroom, and our core technical team has the capacity and experience to produce 1000 laser units per year.
Maintaining a customer-first philosophy, we continuously provide high-quality products and first-class services. Moving forward, we will collaborate with users, suppliers, partners, and research institutions to build a win-win ecosystem and promote technological progress and industrial development.

SUPER WAVE Corporation
Picosecond Laser Leonis Series

With a Pulse Duration of one trillionth of a second (10-12 seconds), it is suitable for high-precision microfabrication. It excels in processing heat-sensitive materials and is used for machining polymers and ceramics. Typical applications include microfabrication, thin film patterning, and cosmetic medical treatments such as spot removal.

IR Laser

For precision laser processing of transparent materials, the current trend is to irradiate with femtosecond lasers at high repetition rates close to the thermal accumulation limit on the workpiece side, causing microscopic non-thermal ablation.
In addition, picosecond lasers with Pulse Duration and energy optimized to achieve maximum ablation without generating debris or cracks have been developed for high-energy and high-repetition output, enabling high-throughput processing.

Green Laser / UV Laser

For precision laser processing of colored materials that absorb in the visible or ultraviolet range, pulse lasers with second harmonic generation (532nm, 515nm) and third harmonic generation (355nm, 343nm) using nonlinear optical crystals are effective. By adjusting the wavelength, energy, Pulse Duration, and irradiation method (burst irradiation, POD pulse-on-demand) according to different absorption rates and thermal relaxation times of the workpiece, maximum throughput can be achieved.


Leonis 15 Series

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Beam Profile of Green Picosecond Laser (8W / 100kHz) (Typical)

Beam Profile of Green Picosecond Laser (8W / 100kHz) (Typical)

Specifications

Model Number Leonis-1064-15 Leonis-532-8 Leonis-355-5
Wavelength 1064±0.5 nm 532±0.5 nm 355±0.5 nm
Power 15 W@100 kHz 8 W@100 kHz 5 W@300 kHz
Repetition Rate 1 Hz~1 MHz 1 Hz~1 MHz 1 Hz~2 MHz
Pulse Energy 150 μJ 80 μJ 15 μJ
Power Stability <1.0% (8 hours, RMS) <1.5% (8 hours, RMS) <2% (8 hours, RMS)
Pulse Duration ~10 ps ~7 ps ~7 ps
Beam Quality TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.2 TEM₀₀, M²≤1.2
Beam Circularity >90% >90% >90%
Beam Diameter 2.0±0.5 mm 1.5±0.5 mm 2.0±0.5 mm
Burst Mode 1~5 1~3 1
Dimensions 600*288*132.5 mm³ 600*288*132.5 mm³ 600*288*132.5 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30  ℃ 22~30  ℃ 22~30  ℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
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Leonis 80 Series

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Applicable Materials

Beam Profile of UV Picosecond Laser (60W / 2MHz) (Typical)

Beam Profile of UV Picosecond Laser (60W / 2MHz) (Typical)

Specifications

Model Number Leonis-1064-30 Leonis-1064-50 Leonis-1064-80
Wavelength 1064±0.5 nm 1064±0.5 nm 1064±0.5 nm
Power 30 W@100 kHz 50 W@100 kHz
50 W@50  kHz		 80 W@Burst 4@20  kHz
Repetition Rate 1 Hz~1 MHz 1 Hz~1 MHz 1 Hz~1 MHz
Pulse Energy 300 μJ 500 μJ@Burst 1
1 mJ@Burst 2		 4 mJ@Burst 4@20 kHz
Power Stability <1.0% (8 hours, RMS) <1.0% (8 hours, RMS) <1.0% (8 hours, RMS)
Pulse Duration ~10 ps ~10 ps ~15 ps
Beam Quality TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3
Beam Circularity >90% >90% >90%
Beam Diameter 3.0±0.5 mm 3.0±0.5 mm 3.0±0.5 mm
Burst Mode 1~5 1~5 5~6
Dimensions 800*364*140 mm³ 800*364*140 mm³ 800*364*140 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30  ℃ 22~30  ℃ 22~30  ℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
Model Number Leonis-532-30 Leonis-532-80 Leonis-355-30 Leonis-355-60
Wavelength 532±0.5 nm 532±0.5 nm 355±0.5 nm 355±0.5 nm
Power 30 W@100  kHz 80 W@400  kHz 30 W@1 MHz 60 W@2 MHz
Repetition Rate 1 Hz~2 MHz 1 Hz~2 MHz 1 Hz~6 MHz 1 Hz~6 MHz
Pulse Energy 300 μJ 200 μJ 30 μJ 30 μJ
Power Stability <1.5% (8 hours, RMS) <1.5% (8 hours, RMS) <1% (8 hours, RMS) <1% (8 hours, RMS)
Pulse Duration ~7 ps ~7 ps ~7 ps ~7 ps
Beam Quality TEM₀₀, M²≤1.2 TEM₀₀, M²≤1.2 TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3
Beam Circularity >90% >90% >90% >90%
Beam Diameter 1.5±0.5 mm 1.5±0.5 mm 3.0±0.5 mm 3.0±0.5 mm
Burst Mode 1~3 1~3 1 1
Dimensions 800*364*140 mm³ 800*364*140 mm³ 800*364*140 mm³ 800*364*140 mm³
Trigger Mode PSO/POD/GATE
(TTL Trigger)		 PSO/POD/GATE
(TTL Trigger)		 PSO/POD/GATE
(TTL Trigger)		 PSO/POD/GATE
(TTL Trigger)
External Power
Control		 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical
Requirements		 AC 100~240 V
/50~60 Hz		 AC 100~240 V
/50~60 Hz		 AC 100~240 V
/50~60 Hz		 AC 100~240 V
/50~60 Hz
Environment
Humidity		 <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment
Temperature		 22~30  ℃ 22~30  ℃ 22~30  ℃ 22~30  ℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
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Leonis 200 Series

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Product Image 1

Beam Profile of Green Picosecond Laser (120W / 400kHz) (Typical)

Beam Profile of Green Picosecond Laser (120W / 400kHz) (Typical)

Specifications

Model Number Leonis-1064-200 Leonis-532-120 Leonis-355-80
Wavelength 1064±0.5 nm 532±0.5 nm 355±0.5 nm
Power 200 W@1 MHz 120 W@400 kHz 80 W@1 MHz
Repetition Rate 1 Hz~2 MHz 1 Hz~2 MHz 1 Hz~2 MHz
Pulse Energy 200 μJ@10 ps / 500 μJ@20 ps 300 μJ 80 μJ
Power Stability <1.0% (8 hours, RMS) <1.5% (8 hours, RMS) <2% (8 hours, RMS)
Pulse Duration ~10 ps ~15 ps ~15 ps
Beam Quality TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3
Beam Circularity >90% >90% >90%
Beam Diameter 3.0±0.5 mm 2.0±0.5 mm 2.0±0.5 mm
Burst Mode 1~10 1~3 1
Dimensions 800*420*139.5 mm³ 800*420*139.5 mm³ 800*420*139.5 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30℃ 22~30℃ 22~30℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
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Leonis 500 Series

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Product Image 1

Beam Profile of IR Picosecond Laser (500W / 5MHz) (Typical)

Beam Profile of IR Picosecond Laser (500W / 5MHz) (Typical)

Specifications

Model Number Leonis-1064-500 Leonis-532-200 Leonis-355-100
Wavelength 1064±0.5 nm 532±0.5 nm 355±0.5 nm
Power 500 W@5 MHz 200 W@1 MHz 100 W@1 MHz
Repetition Rate 1 Hz~6 MHz 1 Hz~2 MHz 1 Hz~2 MHz
Pulse Energy 100 μJ 200 μJ 100 μJ
Power Stability <1.0% (8 hours, RMS) <1.5% (8 hours, RMS) <2% (8 hours, RMS)
Pulse Duration ~10 ps ~15 ps ~15 ps
Beam Quality TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3
Beam Circularity >90% >90% >90%
Beam Diameter 3.0±0.5 mm 2.0±0.5 mm 3.5±0.5 mm
Burst Mode 1~10 1~3 1
Dimensions 980*560*153 mm³ 980*560*153 mm³ 980*560*153 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30℃ 22~30℃ 22~30℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
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Femtosecond Laser Hercules Series

The femtosecond laser has a Pulse Duration of one quadrillionth of a second (10-15 seconds), resulting in extremely minimal thermal effects on materials and enabling more precise processing. Compared to picosecond lasers, femtosecond lasers have shorter Pulse Durations, allowing for higher precision processing, although the cost tends to be higher. Applications include high-precision microprocessing, precision surgeries in the medical field, and scientific research.

IR Laser

For precision laser processing of transparent materials, the trend is to use femtosecond lasers to irradiate at high repetition rates that reach the thermal accumulation limit on the workpiece side, causing micro non-thermal ablation.
Additionally, picosecond lasers with Pulse Durations and energies optimized to maximize ablation without generating debris or cracks have been developed for high-energy and high-repetition operation aimed at high throughput.

Green Laser / UV Laser

For precision laser processing of colored materials that absorb in the visible or UV range, irradiation with second harmonic (532nm, 515nm) or third harmonic (355nm, 343nm) pulse lasers using nonlinear optical crystals is effective. By adjusting the wavelength, energy, Pulse Duration, and irradiation method (burst irradiation, POD pulse on demand) according to the absorption rate and residual heat relaxation time of the workpiece, maximum throughput can be achieved.


Hercules 20 Series

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Product Image 1

Beam Profile of IR Femtosecond Laser (40W / 1000kHz) (Typical)

Beam Profile of IR Femtosecond Laser (40W / 1000kHz) (Typical)

Specifications

Model Number Hercules-1030-20-ND Hercules-1030-40-ND
Wavelength 1030±5 nm 1030±5 nm
Power 20 W@200 kHz 40 W@1000 kHz
Repetition Rate 1 Hz~2 MHz 1 Hz~2 MHz
Pulse Energy 100 μJ 40 μJ
Power Stability <1.0% (8 hours, RMS) <1.0% (8 hours, RMS)
Pulse Duration <240 fs <240 fs
Beam Quality TEM₀₀, M²≤1.2 TEM₀₀, M²≤1.2
Beam Circularity >90% >90%
Beam Diameter 3.0±0.5 mm 3.0±0.5 mm
Burst Mode 1~10 1~10
Dimensions 660*337*150 mm³ 660*337*150 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30℃ 22~30℃
Cooling Circulating Water Cooling Circulating Water Cooling
Model Number Hercules-515-10-ND Hercules-515-20-ND Hercules-343-5-ND
Wavelength 515±3 nm 515±3 nm 343±3 nm
Power 10 W@200 kHz 20 W@1000 kHz 5 W@1000 kHz
Repetition Rate 1 Hz~2 MHz 1 Hz~2 MHz 1 Hz~2 MHz
Pulse Energy 50 μJ 20 μJ 5 μJ
Power Stability <1.0% (8 hours, RMS) <1.0% (8 hours, RMS) <1.0% (8 hours, RMS)
Pulse Duration <200 fs <200 fs <400 fs
Beam Quality TEM₀₀, M²≤1.2 TEM₀₀, M²≤1.2 TEM₀₀, M²≤1.2
Beam Circularity >90% >90% >90%
Beam Diameter 2.0±0.5 mm 2.0±0.5 mm 2.0±0.5 mm
Burst Mode 1~3 1~3 1
Dimensions 660*337*150 mm³ 660*337*150 mm³ 660*337*150 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30℃ 22~30℃ 22~30℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
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Hercules 30 Series

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Product Image 1

Beam Profile of IR Femtosecond Laser (30W / 100kHz) (Typical)

Beam Profile of IR Femtosecond Laser (30W / 100kHz) (Typical)

Specifications

Model Number Hercules-1030-30-ND Hercules-515-15-ND Hercules-343-10-ND
Wavelength 1030±5 nm 515±3 nm 343±3 nm
Power 30 W@100 kHz 15 W@100 kHz 10 W@300 kHz
Repetition Rate 1 Hz~2 MHz 1 Hz~2 MHz 1 Hz~2 MHz
Pulse Energy 300 μJ 150 μJ 30 μJ
Power Stability <1.0% (8 hours, RMS) <1.0% (8 hours, RMS) <1.0% (8 hours, RMS)
Pulse Duration <300 fs <300 fs <400 fs
Beam Quality TEM₀₀, M²≤1.2 TEM₀₀, M²≤1.2 TEM₀₀, M²≤1.2
Beam Circularity >90% >90% >90%
Beam Diameter 3.0±0.5 mm 2.5±0.5 mm 3.0±0.5 mm
Burst Mode 1~10 1~3 1
Dimensions 800*432*149 mm³ 800*432*149 mm³ 800*432*149 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30℃ 22~30℃ 22~30℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
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Hercules 80 Series

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Product Image 1

Beam Profile of IR Femtosecond Laser (50W / 200kHz) (Typical)

Beam Profile of IR Femtosecond Laser (50W / 200kHz) (Typical)

Specifications

Model Number Hercules-1030-50 Hercules-1030-80
Wavelength 1030±5 nm 1030±5 nm
Power 50 W@200 kHz 80 W@200 kHz
Repetition Rate 1 Hz~2 MHz 1 Hz~2 MHz
Pulse Energy 250 μJ 400 μJ
Power Stability <1.0% (8 hours, RMS) <1.0% (8 hours, RMS)
Pulse Duration <600 fs <600 fs
Beam Quality TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3
Beam Circularity >90% >90%
Beam Diameter 2.5±0.5 mm 2.5±0.5 mm
Burst Mode 1~10 1~10
Dimensions 800*432*149 mm³ 800*432*149 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30  ℃ 22~30  ℃
Cooling Circulating Water Cooling Circulating Water Cooling
Model Number Hercules-515-30 Hercules-515-80 Hercules-343-30
Wavelength 515±3 nm 515±3 nm 343±1 nm
Power 30 W@200 kHz 80 W@200 kHz 30 W@1 MHz
Repetition Rate 1 Hz~2 MHz 1 Hz~2 MHz 1 Hz~2 MHz
Pulse Energy 150 μJ 400 μJ 30 μJ
Power Stability <1.5% (8 hours, RMS) <1.5% (8 hours, RMS) <2.0% (8 hours, RMS)
Pulse Duration <500 fs <550 fs <500 fs
Beam Quality TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3
Beam Circularity >90% >90% >85%
Beam Diameter 2.0±0.5 mm 2.5±0.5 mm 2.5±0.5 mm
Burst Mode 1~3 1~3 1
Dimensions 800*432*149 mm³ 800*432*149 mm³ 800*432*149 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30  ℃ 22~30  ℃ 22~30  ℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
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Hercules 300 Series

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Product Image 1

Beam Profile of IR Femtosecond Laser (200W / 100kHz) (Typical)

Beam Profile of IR Femtosecond Laser (200W / 100kHz) (Typical)

Specifications

Model Number Hercules-1030-200 Hercules-1030-300 Hercules-515-120
Wavelength 1030±5 nm 1030±5 nm 515±3 nm
Power 200 W@100 kHz 300 W@1 MHz 120 W@1 MHz
Repetition Rate 1 Hz~2 MHz 1 Hz~2 MHz 1 Hz~2 MHz
Pulse Energy 2 mJ 300 μJ 120 μJ
Power Stability <1.0% (8 hours, RMS) <1.0% (8 hours, RMS) <1.0% (8 hours, RMS)
Pulse Duration <400 fs <400 fs <350 fs
Beam Quality TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3 TEM₀₀, M²≤1.3
Beam Circularity >90% >90% >90%
Beam Diameter 3.0±0.5 mm 3.0±0.5 mm 2.0±0.5 mm
Burst Mode 1~10 1~10 1~3
Dimensions 980*560*153 mm³ 980*560*153 mm³ 980*560*153 mm³
Trigger Mode PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger) PSO/POD/GATE (TTL Trigger)
External Power Control 0~5 V, Linear 0~5 V, Linear 0~5 V, Linear
Electrical Requirements AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz AC 100~240 V / 50~60 Hz
Environment Humidity <60% RH @25 ℃ <60% RH @25 ℃ <60% RH @25 ℃
Environment Temperature 22~30  ℃ 22~30  ℃ 22~30  ℃
Cooling Circulating Water Cooling Circulating Water Cooling Circulating Water Cooling
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